Chantada, L.Kim, M.-S.Manzardo, O.Dändliker, R.Aeschimann, L.Staufer, U.Vettiger, P.Weible, K.Herzig, H. P.2009-04-222009-04-222009-04-22200610.1117/12.664452https://infoscience.epfl.ch/handle/20.500.14299/37987Parallel atomic force microscopy using optical heterodyne detectiontext::conference output::conference proceedings::conference paper