de Koninck, David A.Molina-Lopez, FranciscoBriand, Danickde Rooij, Nico F.2015-02-202015-02-202015-02-20201410.1109/Jmems.2014.2314702https://infoscience.epfl.ch/handle/20.500.14299/111521WOS:000345851100019A cleanroom-free fabrication process adapted to microfluidic devices is presented for pyrotechnical microelectromechanical systems balloon actuators. The actuators are intended for on-chip pumping and fluid ejection to replace tabletop pumping solutions in low-cost portable single-use microfluidic devices. The fabrication process leveraged polymeric foils (polyethylene terephthalate, SU-8, polydimethylsiloxane) for the structure, directly bonded using surface treatments, heat and pressure, and inkjet printing and electroplating for the igniter. This paper also presents a semianalytical model that successfully predicted the inflation height of the balloon for a given device geometry and propellant loading.Bonding processesfluidic microsystemsmicroelectromechanical systemstext::journal::journal article::research article