Perruisseau-Carrier, J.Fritschi, R.Crespo Valero, P.Hibert, C.Zürcher, J.-F.Flückiger, Ph.Skrivervik, A.Ionescu, A. M.2005-10-192005-10-192004https://infoscience.epfl.ch/handle/20.500.14299/217996Fabrication process and model for a MEMS parallel-plate capacitor above CPW linetext::conference output::conference proceedings::conference paper