Sansonnens, L.Howling, A.A.Hollenstein, Ch.Dorier, J.-L.Kroll, U.2008-04-182008-04-182008-04-181994https://infoscience.epfl.ch/handle/20.500.14299/23060LRP 490Role of metastable atoms in Argon-diluted Silane RF plasmastext::report