Niederer, G.Salt, M.Herzig, H. P.Overstolz, T.Noell, W.de Rooij, N. F.2009-04-222009-04-222009-04-22200210.1109/OMEMS.2002.1031462https://infoscience.epfl.ch/handle/20.500.14299/37850Resonant grating filter for a MEMs based add-drop device at oblique incidencetext::conference output::conference proceedings::conference paper