Staufer, U.Akiyama, T.Beuret, C.Gautsch, S.Noell, W.Schürmann, G.Stebler, C.de Rooij, N. F.2009-05-122009-05-122009-05-12200010.1023/A:1010026531885https://infoscience.epfl.ch/handle/20.500.14299/39886Micro-electromechanical systems for nanosciencetext::journal::journal article::research article