Optimization of the Bosch process for micro-mold fabrication

Brugger, JürgenHagelüken, LorenzStettler, Silvan2019-06-142019-06-142019-06-142019-06-07https://infoscience.epfl.ch/handle/20.500.14299/156807Optimization of the Bosch process for micro-mold fabricationstudent work::semester or other student projects