Kuoni, A.Quinche, C.Boillat, M.Keppner, H.de Rooij, N. F.2009-05-122009-05-122009-05-122002https://infoscience.epfl.ch/handle/20.500.14299/39515A high insulating thin film ZnO piezoelectric actuator on a Polyimide substratetext::conference output::conference proceedings::conference paper