Cojocaru, CVHarnagea, CRosei, FPignolet, Avan den Boogaart, MAFBrugger, J2005-11-022005-11-022005-11-02200510.1063/1.1923764https://infoscience.epfl.ch/handle/20.500.14299/218575WOS:000229288700048We achieved parallel nanoscale patterning of ferroelectric complex oxides by pulsed laser deposition through a nanostencil (i.e., through a pattern of apertures in a thin free-standing membrane). Ordered arrays of nanostructured barium titanate (BaTiO3) were obtained onto different substrates in a single deposition step, at room temperature, replicating accurately the aperture patterns in the stencil membrane. After a postdeposition annealing treatment, x-ray diffraction pattern showed a nanocrystalline BaTiO3 structure close to the perovskite cubic phase with grains 30-35 nm in size. Their local ferroelectric properties were detected using piezoresponse force microscopy.shadow-masklithographyfabricationevaporationfilmstext::journal::journal article::research article