Engineering of thin film crystallinity for wear resistant coatings using a combination of PECVD and PVD plasma technology

Neels, A.Dommann, A.Ibzazene, A.Suter, M.Döbeli, M.Ante, M.Ramm, J.2009-05-122009-05-122009-05-122007https://infoscience.epfl.ch/handle/20.500.14299/39630Engineering of thin film crystallinity for wear resistant coatings using a combination of PECVD and PVD plasma technologytext::conference output::conference proceedings::conference paper