Briand, D.Mondin, G.Jenny, S.Banakh, O.van der Wal, P. D.Jeanneret, S.Keppner, H.de Rooij, N. F.2009-05-122009-05-122009-05-122003https://infoscience.epfl.ch/handle/20.500.14299/39076MOLPCVD of Ta2O5 using TaC12H30O5N as Precursor for Batch Fabricationtext::conference output::conference proceedings::conference paper