3d nano-electro-mechanical multiple-state carbon nanotube device structures and methods of fabrication

Cao, JiIonescu, Mihai Adrian2017-06-132017-06-132017-06-132013https://infoscience.epfl.ch/handle/20.500.14299/138285A 3D M-CNT structure with at least one tri-state CNT NEM switch comprising at least an electrode as a source, an electrode as a gate and an electrode as a drain, a conductive carbon nanotube which is able to take three positions depending on a voltage application to said electrodes.3d nano-electro-mechanical multiple-state carbon nanotube device structures and methods of fabricationpatentUS9117889US201330693749580572