Plasma Jet properties in a new spraying process at low pressure for large area thin film deposition

Dorier, J.-L.Gindrat, M.Hollenstein, Ch.Loch, M.Refke, A.Salito, A.Barbezat, G.2008-04-182008-04-182008-04-182001https://infoscience.epfl.ch/handle/20.500.14299/23254LRP 690JETPlasma Jet properties in a new spraying process at low pressure for large area thin film depositiontext::report