Simoes, A. Z.Gonzalez, A. H.Zaghete, M. A.Stojanovic, B. D.Cavalheiro, A. A.Moeckli, P.Setter, N.Varela, J. A.2006-08-212006-08-212006-08-21200210.1080/713716163https://infoscience.epfl.ch/handle/20.500.14299/233490WOS:000177216700007526Polymeric precursor solution (Pechini method) was used to deposit LiNbO3 thin films by spin-coating on (100) silicon substrates. X-ray diffraction data of thin films showed that the increase of oxygen flow promotes a preferred orientation of (001) LiNbO3 planes parallel to the substrate surface. Surface roughness and grain size, observed by atomic force microscopy, change also with oxygen flow.crystallizationlinbo3rietveld analysispulsed-laser depositiongrowthtext::journal::journal article::research article