Buser, R.de Rooij, N. F.2009-05-122009-05-122009-05-12199010.1016/0924-4247(90)85064-Bhttps://infoscience.epfl.ch/handle/20.500.14299/39123Very High Q-Factor Resonators in Monocrystalline Silicontext::journal::journal article::research article