Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators

Martin, F.Jan, M. E.Rev-Mermet, S.Belgacem, B.Su, D.Cantoni, M.Muralt, P.2007-10-182007-10-182007-10-18200610.1109/TUFFC.2006.1665082https://infoscience.epfl.ch/handle/20.500.14299/13092WOS:000238920900015Shear mode coupling and tilted grain growth of AlN thin films in BAW resonatorstext::journal::journal article::research article