Plasma generation by inductive coupling with a planar resonant RF network antenna (vol 45, 082001, 2012)

Lecoultre, S.Guittienne, PhHowling, A. A.Fayet, P.Hollenstein, Ch2013-02-272013-02-272013-02-27201210.1088/0022-3727/45/40/409502https://infoscience.epfl.ch/handle/20.500.14299/89379WOS:000309265100016Plasma generation by inductive coupling with a planar resonant RF network antenna (vol 45, 082001, 2012)text::journal::journal article::research article