Chapter 13 “MEMS Devices” in Fundamentals of Industrial Electronics (The Industrial Electronics Handbook)

Quero, J. M.Luque, AntonioCastañer, L.Rodríguez, A.Fernandez-Bolanos Badia, MontserratFaraone, L.Dell, .J. M2012-02-132012-02-132012-02-132011https://infoscience.epfl.ch/handle/20.500.14299/77693Chapter 13 “MEMS Devices” in Fundamentals of Industrial Electronics (The Industrial Electronics Handbook)text::book/monograph::book part or chapter