Luginbuhl, P.Racine, G. A.Lerch, P.Romanowicz, BartlomiejBrooks, K. G.de Rooij, N. F.Renaud, PhilippeSetter, N.2005-09-132005-09-13199610.1016/S0924-4247(95)01196-Xhttps://infoscience.epfl.ch/handle/20.500.14299/216097The mechanical response of piezoelectric cantilever beams actuated by sol-gel- derived lead zirconium titanate (PZT) thin film is reported. Small multilayered beams are used to analyse the converse piezoelectric effect and to measure the mechanical deflection of the beams with a standard interferometry method. Interferometric displacement measurements, electrical measurements and finite- element simulations are reported to determine the piezoelectric coefficient d(31) of the PZT thin film.text::journal::journal article::research article