Interaction of pulsed VUV radiation with CVD TiO2 thin films. The resist problem.

Mitrev, Pande2009-03-172009-03-172009-03-172003https://infoscience.epfl.ch/handle/20.500.14299/36181[NRG]Interaction of pulsed VUV radiation with CVD TiO2 thin films. The resist problem.student work::master thesis