Karabalin, R. B.Matheny, M. H.Villanueva, L. G.Feng, X. L.Masmanidis, S. C.Defaÿ, E.Le Rhun, G.Marcoux, C.Hentz, S.Andreucci, P.Roukes, M. L.2013-08-062013-08-062013-08-062010https://infoscience.epfl.ch/handle/20.500.14299/93813Piezoelectric Nanomechanical Devicestext::conference output::conference presentation