Dändliker, R.Gray, S.Clube, F.Herzig, H. P.Völkel, R.2009-04-222009-04-222009-04-22199510.1016/0167-9317(94)00090-Hhttps://infoscience.epfl.ch/handle/20.500.14299/37657Non-conventional techniques for optical lithographytext::journal::journal article::research article