Sasaki, M.Hane, K.Briand, D.Noell, W.de Rooij, N. F.2009-05-122009-05-122009-05-12200610.1109/OMEMS.2006.1708275https://infoscience.epfl.ch/handle/20.500.14299/39821Characteristics of Buckled Bridges and Lifted Micromirror Using Film Stresstext::conference output::conference proceedings::conference paper