Montgomery, P.Montaner, D.Manzardo, O.Herzig, H. P.2009-04-222009-04-222009-04-22200410.1117/12.545663https://infoscience.epfl.ch/handle/20.500.14299/37915Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopytext::conference output::conference proceedings::conference paper