Overstolz, T.Niederer, G.Noell, W.Herzig, H. P.Obi, S.Thiele, H.Gale, M. T.de Rooij, N. F.2009-04-222009-04-222009-04-222004https://infoscience.epfl.ch/handle/20.500.14299/37919MEMS tilting platform for filter tuning in optical telecomtext::conference output::conference proceedings::conference paper