Gokce, Sertan KutalHolmstrom, SvenHibert, CyrilleOlcer, SelimBowman, DavidUrey, Hakan2011-12-162011-12-162011-12-16201110.1109/JMEMS.2010.2090507https://infoscience.epfl.ch/handle/20.500.14299/74442WOS:000286934900004A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.Beam steeringcomb driveendoscopic imagingmicroelectromechanical systems (MEMS) stagemicrolens array (MLA)MicroscannerScannerSystemtext::journal::journal article::research article