de Rooij, N. F.Marxer, C.2009-05-122009-05-122009-05-12199810.1109/LEOSST.1998.689715https://infoscience.epfl.ch/handle/20.500.14299/39793Reflective modulators and by-pass-switches: two MEMS components for fiber optictext::conference output::conference proceedings::conference paper