Manzardo, O.Schädelin, F.Noell, W.de Rooij, N. F.Herzig, H. P.2009-04-222009-04-222009-04-22200410.1117/12.545587https://infoscience.epfl.ch/handle/20.500.14299/37912Infra-red MEMS-based Lamellar Grating Spectrometertext::conference output::conference proceedings::conference paper