Prongué, D.Herzig, H. P.Dändliker, R.Gale, M. T.2009-04-222009-04-222009-04-22199210.1364/AO.31.005706https://infoscience.epfl.ch/handle/20.500.14299/37589Optimized kinoform structures for highly efficient fan-out elementstext::journal::journal article::research article