Villanueva, L. G.Vazquez-Mena, O.Montserrat, J.Savu, V.Sidler, K.Bausells, J.Brugger, J.2013-08-062013-08-062013-08-062009https://infoscience.epfl.ch/handle/20.500.14299/93878All through stencil MOSFET fabricationtext::conference output::conference presentation