Wu, YexianAkiyama, TerunobuGautsch, Sebastiande Rooij, Nico2011-11-102011-11-102011-11-10201110.1016/j.proeng.2011.12.411https://infoscience.epfl.ch/handle/20.500.14299/72418WOS:000300512400408We present a planar nanogap structure with heterogeneous metal electrodes separated by a distance of tens of nanometers. This asymmetric nanodevice is meant for metal/molecule/metal transport analysis. The heterogeneous aspect of the metal electrodes is meant to trigger the assembly orientation of selected molecules across the gap. With E-beam overlay technique and double-layer passivation, the structure has a well-defined and reproducible gap and shows good chemical durability and dielectric properties. (C) 2011 Published by Elsevier Ltd.senHeterogeneousNanogapE-beam lithographymolecule analysisNm GapsFabricationElectrodesJunctiontext::conference output::conference proceedings::conference paper