Sidler, KatrinVazquez-Mena, OscarVillanueva, Luis GuillermoSavu, VeronicaBrugger, Juergen2010-01-202010-01-202010https://infoscience.epfl.ch/handle/20.500.14299/45659Flexible Membranes Improve Resolution in Stencil Lithographytext::conference output::conference presentation