Takano, Nvan den Boogaart, M A FDoeswijk, LBrugger, JAuerswald, JKnapp, HHessler, TDubochet, O2006-02-172006-02-172005https://infoscience.epfl.ch/handle/20.500.14299/224136Shadow mask evaporation is a powerful technique which enables us to make micro- or nano-structures on substrates which are not feasible for conventional photolithography processes, such as plastics, pre-structured substrate, biologically/chemically modified surfaces, etc. In this project, we investigated (i) the transformation of apertures of microstencil mask after several metal deposition steps, and (ii) the resolution of deposited microstructures with/without a gap between a stencil mask and a substrate. The purpose was to asses the microstenciling technique as low-cost production process of microelectrodes onto plastic substrates, which could be applied, for instance, as sensor electrodes on BioMEMS, etc.text::report