Copt, F.Koechli, Ch.Perriard, Y.2016-12-092016-12-092016-12-092016https://infoscience.epfl.ch/handle/20.500.14299/131880In this paper, a MEMs relay for high power application is investigated. This relay has to hold a current of the order of magnitude of the Ampere and is subject to harsh environment such as high temperature or vibrations which can lead to a premature dysfunction. The paper presents an analytical modelling of the relays considering the geometry, the contact resistance and also the effect of vibrations under which the relay is exposed. A difference of a few percentages is found between the analytical model and the FEM providing interesting optimizing tool.Contact resistanceElectrostaticHigh powerMEMsRelayElectrostatically actuated MEMs relay for high power applicationstext::conference output::conference proceedings::conference paper