Romanowicz, BartlomiejLaudon, M.Lerch, P.Renaud, PhilippeAmann, H. P.Boegli, A.Moser, V.Pellandini, F.2005-09-132005-09-132005-09-13199710.1109/EDTC.1997.582344https://infoscience.epfl.ch/handle/20.500.14299/216102WOS:A1997BH54U00018The analytical modeling and simulation of conservative electrostatic, electromagnetic and electrodynamic transducers found in microsystems using a non-linear lumped-parameter approach is presented in this paper. A comparison is made between this approach and the linearized equivalent circuit method All models of transducers are written in HDL-A(TM), a proprietary analogue hardware description language (HDL). System-level simulation is performed in the SPICE simulator using behavioral models of the transducers. Finally, a parameter extraction and HDL model generation tool for devices is presented.text::conference output::conference proceedings::conference paper