Le Dréo, H.Banakh, O.Keppner, H.Steinmann, P.-A.Briand, D.de Rooij, N. F.2009-05-122009-05-122009-05-122006https://infoscience.epfl.ch/handle/20.500.14299/39218Optical, Electrical and Mechanical Properties of the Tantalum Oxynitride Thin Films Deposited by Pulsing Reactive Gas Sputteringtext::conference output::conference proceedings::conference paper