Maillard, DamienDe Pastina, AnnalisaLarsen, TomVillanueva, Luis Guillermo2019-07-082019-07-082019-07-082019-04-0110.1063/1.5088946https://infoscience.epfl.ch/handle/20.500.14299/158911WOS:000466709400054We report on the design and operation of a world-to-chip microfluidic interface and experimental setup for fluidic micro- and nano-electromechanical systems. The central component of the interface is an engineered polyether ether ketone connector that brings fluid samples from a commercial syringe pump to the chip with the help of o-rings. In addition to that, the connector serves as an on-chip vacuum chamber. To confirm the adequate operation of our interface, we use complex microfluidic devices that were previously fabricated, suspended microchannel resonators, and demonstrate a fast exchange between fluids (on the scale of 130 s from isopropyl alcohol to water), in-vacuum operation of the devices (intrinsic damping regime), and accurate temperature control of the chip at different set points.Instruments & InstrumentationPhysicsPhysics, Appliedsuspended microchannel resonatorsModular interface and experimental setup for in-vacuum operation of microfluidic devicestext::journal::journal article::research article