Jacot-Descombes, LoïcGullo, Rosario MaurizioCadarso Busto, Victor JavierBrugger, Jürgen2011-08-282011-08-282011-08-282011https://infoscience.epfl.ch/handle/20.500.14299/70303Well controlled spherical microstructures could enable several novel MEMS devices. However, micro machining of spherical shapes has proven to be difficult with conventional planar microfabrication processes [1]. This paper presents a method allowing to fabricate controlled micro spherical structures. Drops of approximately 30 picoliters of polymeric solution were accurately inkjet printed on rounded platforms. The deposited volume is confined by rim of these platforms, thus allowing a fine control of the spherical cap edge angle as well as the volume and the radius of curvature. The process proposed allowed to fabricate large arrays of micro spherical shapes, with a controlled edge angle between 25° and 110°. Several arrays of 30 by 30 micro hemispheres with an edge angle of 90° have been successfully fabricated with a yield above 98%.enSU-8-based epoxy inkdrop-on-demand inkjet printingmicro drop confinementmicro spherical cap arraysmicro lens arraysradius of curvature controlledtext::conference output::conference proceedings::conference paper