Yoshikawa, G.Akiyama, TerunobuGautsch, SebastianVettiger, PeterRohrer, H.2011-11-282011-11-282011-11-282011https://infoscience.epfl.ch/handle/20.500.14299/72863Optimization of Piezoresistive Cantilever Sensors towards Highly Sensitive Membrane-type Surface Stress Sensor (MSS)text::conference output::conference presentation