Fournier, Y.Rouelle, G. BoutinardCraquelin, N.Maeder, T.Ryser, P.2012-01-122012-01-122012-01-12200910.1016/j.proche.2009.07.367https://infoscience.epfl.ch/handle/20.500.14299/76599WOS:000275995600154We propose an SMD (surface mount device) sensor in LTCC (low-temperature co-fired ceramic) technology specially designed for standard industrial compressed air. It combines the measurement of pressure, flow, and temperature, with its integrated signal conditioning electronics. Such a sensor can be mounted on an integrated electro-fluidic platform like a standard component using surface mount technology, obviating the need for both wires and tubes.LTCCintegrated sensorpressureflowtemperatureSMD mountingcouches épaissesthick-film technologySMD pressure and flow sensor for compressed air in LTCC technology with integrated electronicstext::conference output::conference proceedings::conference paper