Tosolini, G.Villanueva, G.Bausells, J.García Loureiro, A.Iglesias, N. S.Aldegunde Rodríguez, M. A.Comesana Figueroa, E.2013-08-062013-08-062013-08-06200910.1109/SCED.2009.4800525https://infoscience.epfl.ch/handle/20.500.14299/93844Silicon microcantilevers with piezoresistive and MOSFET detectiontext::conference output::conference proceedings::conference paper