Scanning Probe with Tuning Fork Sensor, Microfabricated Silicon Cantilever and Conductive Tip for Microscopy at Cryogenic Temperature

Akiyama, T.Suter, K.de Rooij, N. F.Baumgartner, A.Gildmeister, A.Ihn, T.Ensslin, K.Staufer, U.2009-05-122009-05-122009-05-122005https://infoscience.epfl.ch/handle/20.500.14299/38934Scanning Probe with Tuning Fork Sensor, Microfabricated Silicon Cantilever and Conductive Tip for Microscopy at Cryogenic Temperaturetext::conference output::conference proceedings::conference paper