Kroll, U.Ziegler, Y.Meier, J.Keppner, H.Shah, A.2009-02-102009-02-102009-02-10199410.1557/PROC-336-115https://infoscience.epfl.ch/handle/20.500.14299/34876More Insight into the VHF-Glow-Discharge by Plasma Impedance Measurementstext::journal::journal article::research article