Dubois, P.Guldimann, B.Grétillat, M.-A.de Rooij, N. F.2009-05-122009-05-122009-05-12200110.1109/MEMSYS.2001.906597https://infoscience.epfl.ch/handle/20.500.14299/39219Electrostatically actuated gas microvalve based on a Ta-Si-N membranetext::conference output::conference proceedings::conference paper