Friedrich, F.Lockhart, R.Briand, D.Isarakorn, D.Margairaz, P.Sandoz, J.-P.Brossard, J.Keppner, H.Olson, W.Dietz, T.de Rooij, N. F.Bruger, J.2013-05-172013-05-172013-05-172012https://infoscience.epfl.ch/handle/20.500.14299/92291Silicon micromachined ultrasonic transducer for cutting applications with improved power transfertext::conference output::conference proceedings::conference paper