Theoretical and experimental limits of quantitative analysis of strain and chemistry of inGasAs/GaAs layers using (200) dark-fiel TEM imaging

Cagnon, J.Buffat, P. A.Stadelmann, P. A.Leifer, K.2007-02-152007-02-152007-02-152003https://infoscience.epfl.ch/handle/20.500.14299/3061Theoretical and experimental limits of quantitative analysis of strain and chemistry of inGasAs/GaAs layers using (200) dark-fiel TEM imagingtext::journal::journal article::research article