Aksu, SerapYanik, Ahmet A.Adato, RonenArtar, AlpHuang, MinAltug, Hatice2016-08-162016-08-162016-08-16201010.1109/PHOTONICS.2010.5698768https://infoscience.epfl.ch/handle/20.500.14299/128667We demonstrate a novel approach for high-throughput and high-resolution fabrication of engineered infrared plasmonic antenna arrays with reusable nanostencils. Optical responses of these plasmonic antennas are comparable to that of arrays fabricated by electron-beam lithography.Engineered plasmonic nanoantenna arrays with nanostencil lithographytext::conference output::conference proceedings::conference paper