Jiguet, SébastienBertsch, ArnaudHofmann, H.Renaud, Philippe2005-09-132005-09-13200410.1002/adem.200400068https://infoscience.epfl.ch/handle/20.500.14299/216217WOS:0002241843000035664percolationconductivityphotoresistpolymermemsSU8-silver photosensitive nanocompositetext::journal::journal article::research article