Mouchet, C.Latu-Romain, L.Cayron, C.Rouviere, E.Celle, C.Simonato, J.-P.2014-11-142014-11-142014-11-14200810.1088/0957-4484/19/33/335603https://infoscience.epfl.ch/handle/20.500.14299/108860The first results on a simple new process for the direct fabrication of one-dimensional superlattices using common CVD chambers are presented. The experiments were carried out in a 200 mm industrial Centura reactor (Applied Materials). Low dimensionality and superlattices allow a significant increase in the figure of merit of thermoelectrics by controlling the transport of phonons and electrons. The monocrystalline nanowires produced according to this process are both one-dimensional and present heterostructures, with very thin layers (40 nm) of Si and SiGe. Concentrations up to 30 at.% Ge were obtained in the SiGe parts. Complementary techniques including transmission electronic microscopy (TEM), selected area electron diffraction (SAED), energy dispersive x-ray spectroscopy (EDS), scanning transmission electron microscopy (STEM) in bright field and high angle annular dark field (HAADF STEM), and energy-filtered transmission electron microscopy (EF-TEM) were used to characterize the nanoheterostructures. © IOP Publishing Ltd.Applied Materials (CO)articleBright-field (BF)Chemical vapor depositionComplementary techniquesCrystalsDirect fabricationElectric wireElectronic microscopyElectron microscopesElectronselectron transportEnergy dispersive X ray spectroscopyEnergy dispersive X ray spectroscopy (EDXS)Energy filtered transmission electron microscopyEnergy filtered transmission electron microscopy (EFTEM)Figure-of-merit (FoM)GermaniumHAADF STEMHeterostructuresHigh angle annular dark field (HAADF)high angle annular dark field scanning transmission electron microscopyLow dimensionalityMaterials scienceMeasurement theoryMonocrystalline (MD)monocrystalline nanowireNano-heterostructuresnanomaterialNanostructured materialsnanowireNew processesOne-dimensionalOne dimensional superlatticesOptical designphononPotassium compoundspriority journalscanning electron microscopyscanning transmission electron microscopyScanning Transmission Electron Microscopy (STEM)selected area electron diffractionSelected area electron diffraction (SAED)Semiconducting germanium compoundsSemiconducting silicon compoundsSiliconSilicon alloyssilicon germaniumSuperlatticesThin layeringTransmission electron microscopytext::journal::journal article::research article