Oxygen diluted hexamethyldisiloxane plasmas investigated by means of in situ infrared absorption spectroscopy and mass spectrometry

Magni, D.Deschenaux, Ch.Hollenstein, Ch.Creatore, A.Fayet, P.2008-04-182008-04-182008-04-182000https://infoscience.epfl.ch/handle/20.500.14299/23236LRP 686Oxygen diluted hexamethyldisiloxane plasmas investigated by means of in situ infrared absorption spectroscopy and mass spectrometrytext::report